Automated Characterization Suite (ACS) Test System Updated

V4 now completes wafer level reliability testing up to five times faster.

by DE Editors | Published May 6, 2008

Keithley Instruments, Inc. (Cleveland, OH) enhanced its Automated Characterization Suite (ACS) software to include optional wafer level reliability (WLR) test tools for semiconductor reliability and lifetime prediction testing applications.

Version 4.0 builds on the ACS software's existing single- and multi-site parallel test capabilities, adding a database capability, as well as software tools and optional licenses for the new Reliability Test Module (RTM) and ACS Data Analysis capabilities. Together, the two new tools allow ACS-based test systems to produce lifetime predictions as much as five times faster than traditional WLR test solutions.

By accelerating WLR testing during the technology development, process integration, and process monitoring phases of creating new integrated circuits, ACS systems can reduce time to market for new products.

ACS-based test systems have the hardware configuration flexibility necessary to address a wide range of semiconductor characterization needs at the device, wafer, or cassette level. They can incorporate either Keithley's Series 2600 System SourceMeter instruments, the company's Model 4200-SCS Semiconductor Characterization System, or both.

WLR testing is used to predict reliable lifetimes for semiconductor components such as transistors, capacitors, and interconnects. These tests, performed on on-wafer test structures, can reveal critical reliability information during research and development; similar tests are used to monitor the consistency of manufacturing processes once devices go into full production.

The RTM option available with ACS 4.0 is a stress/measure sequencing tool that provides an interactive interface for testing device reliability (HCI, BTI, etc.), gate oxide integrity (TDDB, JRAMP, VRAMP, etc.), and metal interconnects (EM).

The Data Analysis option supports standard analysis techniques like normal fitting, acceleration, and distribution models. Both the ACS 4.0 test executive and the Data Analysis option allow for offline installations.

ACS 4.0 software can be used to drive test systems made up exclusively of Series 2600 System SourceMeter instruments, just the Model 4200-SCS Semiconductor Characterization System, or a combination of both.

To learn more about the latest enhancements to ACS-based integrated test systems, visit Keithley.

Sources: Press materials received from the company and additional information gleaned from the company's website.

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